Method and apparatus for merging multiple geometrical pixel images and generating a single modulator pixel image
作者： Lars Ivansen , Anders Osterberg
DOI:
关键词:
摘要: The present invention relates to customizing individual workpieces, such as chip, flat panels or other electronic devices produced on substrates, by direct writing a custom pattern. Customization can be per device, substrate, batch at some small volume that makes it impractical use mask set. In particular, latent image formed in patterning sensitive layer over merging standard and pattern data form used produce the customized image. A wide variety of substrates benefit from technology disclosed.
lens.org 参考文章(109)
Michael R. Diehl, Scan line generator for area fill of extensible polygons ,(1995)
Thomas Chabreck, Ali Ehsani, John Engel, Laser pattern imaging of circuit boards with grayscale image correction ,(2000)
Steven A. Lyons, Charles S. Biechler, Allen M. Carroll, Richard E. Graves, Virtual addressing for E-beam lithography ,(1983)
Torbjörn Sandström, Improved pattern generator ,(1999)
Michael R. Sogard, Coherence-reduction devices and methods for pulsed lasers ,(2009)
Robert M. Tanner, Error detecting and correcting memories ,(1983)
Jarek Luberek, Illumination methods and devices for partially coherent illumination ,(2011)
Yutaka Ichihara, Illuminating optical apparatus ,(1991)
Lars Ivansen, Anders Osterberg, Gradient assisted image resampling in micro-lithographic printing ,(2009)
Torbjörn Sandström, Defective pixel compensation method ,(2002)