A high-sensitivity integrated-circuit capacitive pressure transducer
作者： W.H. Ko , Min-Hang Bao , Yeun-Ding Hong
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摘要: A high-sensitivity capacitive pressure transducer with active processing circuit on the chip has been demonstrated and evaluated. The configuration optimized by computer-aided design to achieve highest sensitivity for a given maximum dimension. measured of devices is in range 50-150 µV/ V . mmHg, which approximately one order magnitude higher than piezoresistive comparable size. Theoretical analysis also shows that 1000 µV/V mmHg possible using approach if dimension device can be enlarged full scale lowered. Other characteristics have investigated are presented.
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