A Parametric Study of Dimensional Tolerance and Hydrodynamic Debris Removal in Micro-Electro-Discharge Machining
作者： M.T. Richardson , Y.B. Gianchandani , D.S. Skala
DOI: 10.1109/MEMSYS.2006.1627799
关键词:
摘要: This paper reports a detailed evaluation of batch mode micro-electro-discharge machining (μEDM) 316L stainless steel. Lithographically fabricated copper tools with parallel line features 5-50 μm width and 5-75 spacing were used to quantify trends in tolerance the impact debris accumulation. As tool feature density increased, accumulation effects began dominate, eventually destroying both workpiece. A two-step hydrodynamic removal technique yielded significant improvements surface edge finish, time, wear over past work using standard vertical dither flushing.
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