Micro electro-discharge machining and its applications

摘要: A micro electro-discharge machining (MEDM) technology is presented. It allows of holes and shafts as small 5 mu m in diameter with a best surface roughness 0.1 R/sub max/ roundness 0.5 m, well variety complex shapes equivalent accuracy. In the MEDM, for silicon 10-100 Omega -cm resistivity possible; up to depth 10 times electrode easy, wear small. prototype microair turbine 2.2 mm external diameter, which able rotate at speed approximately 1000 r.p.m., discussed. >