Dynamics of ablation of polymethyl methacrylate films by near ultraviolet light of an Ar+laser
作者： S I Bozhevolnyi , I V Potemkin
DOI: 10.1088/0022-3727/27/1/003
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摘要: The dynamics of cw near ultraviolet (NUV) laser ablation polymethyl methacrylate (PMMA) films are investigated by recording the time dependence reflected light power. A new phenomenon in PMMA, which is similar to 'incubation' pulses excimer ablation, recognized as period when polymer fragments accumulated up a critical density followed volume explosion. incubation found decrease intensity film and/or temperature increases. However, for sufficiently high intensities depends only upon temperature. dynamic model process during proposed accounts main features our observations and provides consistent quantitative description mechanism underlying initial stage i.e. before
sci-hub.se 参考文章(15)
S. I. Bozhevolnyi, I. V. Potemkin, V. B. Svetovoy, Direct writing in polymethyl methacrylate films using near‐ultraviolet light of Ar+laser Journal of Applied Physics. ,vol. 71, pp. 2030- 2032 ,(1992) , 10.1063/1.351146
R. Srinivasan, Bodil Braren, Use of temporally coincident ultraviolet laser pulses of two different wavelengths to ablate organic polymers Journal of Applied Physics. ,vol. 68, pp. 1837- 1841 ,(1990) , 10.1063/1.346619
E. Sutcliffe, R. Srinivasan, Dynamics of UV laser ablation of organic polymer surfaces Journal of Applied Physics. ,vol. 60, pp. 3315- 3322 ,(1986) , 10.1063/1.337698
Roger Kelly, Antonio Miotello, Bodil Braren, Arunava Gupta, Kelly Casey, Primary and secondary mechanisms in laser-pulse sputtering Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 65, pp. 187- 199 ,(1992) , 10.1016/0168-583X(92)95033-N
M. Lanagan, S. Lindsey, N. S. Viswanathan, Deep UV Ablation of PMMA Resists Japanese Journal of Applied Physics. ,vol. 22, ,(1983) , 10.1143/JJAP.22.L67
G. V. Treyz, R. Scarmozzino, R. M. Osgood, Deep ultraviolet laser etching of vias in polyimide films Applied Physics Letters. ,vol. 55, pp. 346- 348 ,(1989) , 10.1063/1.101904
M. Lax, Temperature rise induced by a laser beam Journal of Applied Physics. ,vol. 48, pp. 3919- 3924 ,(1977) , 10.1063/1.324265
D. Singleton, G. Paraskevopoulos, R. Taylor, L. Higginson, Excimer laser angioplasty: Tissue ablation, arterial response, and fiber optic delivery IEEE Journal of Quantum Electronics. ,vol. 23, pp. 1772- 1782 ,(1987) , 10.1109/JQE.1987.1073231
R. Srinivasan, Photokinetic etching of polymethyl methacrylate films by continuous wave ultraviolet laser radiation Journal of Applied Physics. ,vol. 70, pp. 7588- 7593 ,(1991) , 10.1063/1.349714
J. E. Bjorkholm, L. Eichner, J. C. White, R. E. Howard, H. G. Craighead, Direct writing in self-developing resists using low-power cw ultraviolet light Journal of Applied Physics. ,vol. 58, pp. 2098- 2101 ,(1985) , 10.1063/1.335973