Substrate treating device

摘要: PROBLEM TO BE SOLVED: To reduce the floor-space for a substrate treating device and to prevent contamination of board then it is transported by an AGV. SOLUTION: At cleaning part 20, W1 which supported almost horizontally in horizontal direction supplied with agent. The agent dried. resist coating developing 30, coated after exposure developed. 20 provided delivery IF receiving delivered between 30. lifter 28 storing once, transporting robot TR delivering locating 30 through 28.