Substrate processing device and method therefor, and method for manufacturing substrate
作者： Yoshitake Ito , 美岳 伊藤
DOI:
关键词: Block (data storage) 、 Mechanical engineering 、 Transfer (computing) 、 Line (text file) 、 Electronic engineering 、 Substrate (printing) 、 Perpendicular 、 Process (computing) 、 Engineering
摘要: PROBLEM TO BE SOLVED: To enhance a degree of freedom in location structure device by intending to make block configuration the minimum unit, downsizing entire without accompanying problem configuration, and reduce foot-print device. SOLUTION: There are provided process part locations 21 23 structured so that plurality parts for making predetermined with respect processing substrate G located one direction; first carrying within locations; second structures 11 15 fixedly outside substantially extension line side, or direction perpendicular direction, or/and movably parallel as transfer directly indirectly structure.
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