Manufacturing method of magnetoresistive effect element, manufacturing method of thin-film magnetic head and thin-film magnetic head
作者： Takayasu Kanaya , Takeo Kagami
DOI:
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摘要: A manufacturing method of an MR element in which current flows a direction perpendicular to layer planes, includes step forming on lower electrode multi-layered film having cap at top thereof, mask the film, patterning by milling through form structure, magnetic domain control bias using lift off mask, of, after layer, additional and part planarizing surface upper planarized surface.
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