Process for integrating planar and non-planar cmos transistors on a bulk substrate and article made thereby

作者: Mark L. Doczy , Justin K. Brask , Brian S. Doyle , Robert S. Chau , Uday Shah

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摘要: A process capable of integrating both planar and non-planar transistors onto a bulk semiconductor substrate, wherein the channel all is definable over continuous range widths.

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