Robust control of VO 2 -coated microactuators based on self-sensing feedback
作者： Emmanuelle Merced , Jun Zhang , Xiaobo Tan , Nelson Sepulveda
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摘要: A novel self-sensing and robust control technique is presented for a vanadium dioxide (VO2)-coated silicon (Si) microactuator. The deflection output of the microactuator estimated by resistance-based through high-order polynomial model in order to eliminate need complicated sensing mechanisms. To accommodate uncertainties produced hysteresis between temperature input, error model, an H∞ controller designed implemented control. performance tested experiments under step sinusoidal reference inputs compared that proportional-integral-derivative (PID) controller. outperforms PID with 31% 43% less root-mean-square-error references, respectively, while maintaining 3.1% effort latter.
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