Electrical Properties of Lead Zinc Niobate - Lead Zirconate Titanate Thick Films Formed by Aerosol Deposition Process
作者： Jong Jin Choi , Joo Hee Jang , Dong Soo Park , Byung Dong Hahn , Woon Ha Yoon
DOI: 10.4028/WWW.SCIENTIFIC.NET/SSP.124-126.169
关键词:
摘要: Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of 5~10 μm were fabricated on silicon and sapphire substrates using aerosol deposition method. The contents PZN varied from 0, 20 40 %. as deposited film had fairly dense microstructure without any crack, showed only a perovskite single phase formed nano-sized grains. as-deposited annealed at temperatures 700oC, the 900oC in electrical furnace. effects addition microstructural evolution observed FE-SEM HR-TEM, dielectric ferroelectric properties characterized impedance analyzer Sawyer-Tower circuit, respectively. PZT poor than pure when coated substrate other hand, higher remanent polarization constant values then 900oC. characteristics 20% comparable obtained bulk ceramic specimen same composition sintered 1200oC.
sci-hub.se 参考文章(9)
Gene H. Haertling, PLZT electrooptic materials and applications: a review Ferroelectrics. ,vol. 75, pp. 25- 55 ,(1987) , 10.1080/00150198708008208
Q.F Zhou, H.L.W Chan, C.L Choy, PZT ceramic/ceramic 0-3 nanocomposite films for ultrasonic transducer applications Thin Solid Films. ,vol. 375, pp. 95- 99 ,(2000) , 10.1016/S0040-6090(00)01232-3
Jun Akedo, Maxim Lebedev, Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method Japanese Journal of Applied Physics. ,vol. 38, pp. 5397- 5401 ,(1999) , 10.1143/JJAP.38.5397
Huiqing Fan, Hyoun-Ee Kim, Perovskite stabilization and electromechanical properties of polycrystalline lead zinc niobate–lead zirconate titanate Journal of Applied Physics. ,vol. 91, pp. 317- 322 ,(2002) , 10.1063/1.1421036
Jun Akedo, Maxim Lebedev, Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films Japanese Journal of Applied Physics. ,vol. 41, pp. 6980- 6984 ,(2002) , 10.1143/JJAP.41.6980
R.A. Dorey, R.W. Whatmore, Electroceramic thick film fabrication for MEMS Journal of Electroceramics. ,vol. 12, pp. 19- 32 ,(2004) , 10.1023/B:JECR.0000033999.74149.A3
Seung-Eek Park, Thomas R. Shrout, Ultrahigh strain and piezoelectric behavior in relaxor based ferroelectric single crystals Journal of Applied Physics. ,vol. 82, pp. 1804- 1811 ,(1997) , 10.1063/1.365983
Sung-Mi Lee, Chang-Bun Yoon, Seung-Ho Lee, Hyoun-Ee Kim, Effect of lead zinc niobate addition on sintering behavior and piezoelectric properties of lead zirconate titanate ceramic Journal of Materials Research. ,vol. 19, pp. 2553- 2556 ,(2004) , 10.1557/JMR.2004.0328
D.L. Polla, L.F. Francis, Ferroelectric Thin Films in Micro-electromechanical Systems Applications Mrs Bulletin. ,vol. 21, pp. 59- 65 ,(1996) , 10.1557/S0883769400035934