Aluminum doping for optimization of ultrathin and high-k dielectric layer based on SrTiO3
作者： Ji-Ye Baek , Le Thai Duy , Sang Yeon Lee , Hyungtak Seo
DOI: 10.1016/J.JMST.2019.12.006
关键词:
摘要: … doping, the electronic structure of SrTiO 3 is changed in this study because it is an effective method for doping … sputtering allows uniform doping and easy control of the doping amount, …
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