Method for fabricating a semiconductor memory device having a stacked capacitor cell

作者: Eui K. Ryou

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摘要: A semiconductor memory device capable of obtaining a sufficient charge storage capacity and yet having reduced occupied cell area. The includes field effect transistor formed on substrate, an interlayer insulating film over the transistor, first electrode pattern plane plate shape such that it is electrically connected with second double cylindrical structure pattern, dielectric sequentially entire exposed surfaces patterns.