Elements of Sputtering Theory
作者： Franciszek Krok , Salah Saeed , Marek Kolmer , Marek Szymonski
DOI: 10.1201/B13726-5
关键词:
摘要: This is a brief introduction into sputtering theory, focusing on aspects which may be of interest in the context nanopatterning. The subject matter classified highand lowenergy processes. Prime quantities are sputter yield and its dependence ion type, energy angle incidence, stoichiometry sputtered flux from compound target, fluctuations. Comments made standard input such as interatomic potentials electronic stopping cross sections.
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