TEXTURE OF TETRAGONAL ALPHA-FESI2 FILMS ON SI(001)

作者: C. Detavernier , C. Lavoie , J. Jordan-Sweet , A. S. Özcan

DOI: 10.1103/PHYSREVB.69.174106

关键词:

摘要:

参考文章(11)
C. E. Murray, K. P. Rodbell, Texture inheritance in Al(Cu) interconnect materials Journal of Applied Physics. ,vol. 89, pp. 2337- 2342 ,(2001) , 10.1063/1.1337938
Carl.V. Thompson, Roland Carel, Texture development in polycrystalline thin films Materials Science and Engineering B-advanced Functional Solid-state Materials. ,vol. 32, pp. 211- 219 ,(1995) , 10.1016/0921-5107(95)03011-5
JME Harper, KP Rodbell, Microstructure control in semiconductor metallization Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. ,vol. 15, pp. 763- 779 ,(1997) , 10.1116/1.589407
C. Detavernier, A. S. Özcan, J. Jordan-Sweet, E. A. Stach, J. Tersoff, F. M. Ross, C. Lavoie, An off-normal fibre-like texture in thin films on single-crystal substrates Nature. ,vol. 426, pp. 641- 645 ,(2003) , 10.1038/NATURE02198
C. W. T. Bulle‐Lieuwma, A. H. van Ommen, J. Hornstra, C. N. A. M. Aussems, Observation and analysis of epitaxial growth of CoSi2 on (100) Si Journal of Applied Physics. ,vol. 71, pp. 2211- 2224 ,(1992) , 10.1063/1.351119
A. S. Özcan, K. F. Ludwig, P. Rebbi, C. Lavoie, C. Cabral, J. M. E. Harper, Texture of TiSi2 thin films on Si (001) Journal of Applied Physics. ,vol. 92, pp. 5011- 5018 ,(2002) , 10.1063/1.1509849
A. S. Özcan, K. F. Ludwig, C. Cabral, C. Lavoie, J. M. E. Harper, Texture formation in Ti–Ta alloy disilicide thin films Journal of Applied Physics. ,vol. 92, pp. 7210- 7218 ,(2002) , 10.1063/1.1519338
J.Y. Natoli, I. Berbezier, A. Ronda, J. Derrien, Chemical beam epitaxy of iron disilicide on silicon Journal of Crystal Growth. ,vol. 146, pp. 444- 448 ,(1995) , 10.1016/0022-0248(94)00545-1
H.-U. Nissen, E. Müller, H. R. Deller, H. Von Känel, TEM investigation of iron disilicide films on Si(001) grown by molecular beam epitaxy Physica Status Solidi (a). ,vol. 150, pp. 395- 406 ,(1995) , 10.1002/PSSA.2211500135
J. Derrien, I. Berbezier, A. Ronda, J.Y. Natoli, Interface phase transition as observed in ultra thin FeSi2 epilayers Applied Surface Science. ,vol. 92, pp. 311- 320 ,(1996) , 10.1016/0169-4332(95)00248-0