Substrate orientation effects on the nucleation and growth of the Mn+1AXn phase Ti2AlC

作者: Mark D. Tucker , Per O. Å. Persson , Mathew C. Guenette , Johanna Rosén , Marcela M. M. Bilek

DOI: 10.1063/1.3527960

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摘要: The Mn+1AXn (MAX) phases are ternary compounds comprising alternating layers of a transition metal carbide or nitride and third “A-group” element. effect substrate orientation on the growth Ti2AlC MAX phase films was investigated by studying pulsed cathodic arc deposited samples grown sapphire cut along (0001), (101¯0), (11¯02) crystallographic planes. Characterization these x-ray diffraction, atomic force microscopy, cross-sectional transmission electron microscopy. On (101¯0) substrate, tilted (101¯8) found, such that TiC octahedra structure have same as spontaneously formed epitaxial sublayer, preserving typical TiC–Ti2AlC relationship confirming importance this in determining film orientation. An additional component with fiber texture observed sample; texture, axiotaxy, has not previously been seen...

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