Resizing metal-coated nanopores using a scanning electron microscope.
作者： Guillaume A. T. Chansin , Jongin Hong , Jonathan Dusting , Andrew J. deMello , Tim Albrecht
关键词:
摘要: Electron beam-induced shrinkage provides a convenient way of resizing solid-state nanopores in Si(3) N(4) membranes. Here, scanning electron microscope (SEM) has been used to resize range different focussed ion beam-milled Al-coated Energy-dispersive X-ray spectra and SEM images acquired during highlight that time-variant carbon deposition process is the dominant mechanism pore shrinkage, although granular structures on membrane surface vicinity pores suggest competing processes may occur. Shrinkage observed Al side as well side, while rate be dependent variety factors.
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