Preferential ejection of high-energy sputtered Cu atoms in keV atom – Cu(110) collisions

作者: T.T. Nuver , H. Rudolph , P.A. Zeijlmans van Emmichoven , A. Niehaus

DOI: 10.1016/S0168-583X(99)01011-3

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摘要: Abstract Preferential ejection of sputtered target atoms during the bombardment crystalline solids by ions (atoms) is not restricted to dominant low-energy part sputtering. In our MARLOWE simulations for a Cu(110) surface with keV Xe and Kr we have observed focused spots in angular distribution Cu which are energies larger than 200 eV. We found that predominantly originate from first four layers. The escaping blocked same layer or nearer when they travel towards vacuum. spot positions roughly coincide most open directions crystal as seen respective absolute relative intensities depend on incidence conditions. There no specific collision sequence associated individual high-energy spots.

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