摘要: Abstract The computer code OKSANA is applied to calculate the depth of origin atoms sputtered from an amorphous Si target under ion bombardment. Most simulations refer 2 keV Ne emphasis put on comparison distributions found by simulation with profiles predicted analytical theory which known overestimate mean escape depth. It has been shown that failing include coarse-grain structure and some simplifying assumptions concerning generation transport recoils are main reasons for high theoretical values
harvard.edu
elsevier.com
sci-hub.se 参考文章(28)
K. Wittmaack, D.B. Poker, Interface broadening in sputter depth profiling through alternating layers of isotopically purified silicon: I. Experimental results☆ Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 47, pp. 224- 235 ,(1990) , 10.1016/0168-583X(90)90750-O
V.I. Shulga, P. Sigmund, Analysis of the primary process in isotope sputtering Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 119, pp. 359- 374 ,(1996) , 10.1016/0168-583X(96)00355-2
G. Falcone, P. Sigmund, Depth of origin of sputtered atoms Applied physics. ,vol. 25, pp. 307- 310 ,(1981) , 10.1007/BF00902988
V. E. Yurasova, V. I. Shulga, D. S. Karpuzov, Ion reflection from a single crystal Canadian Journal of Physics. ,vol. 46, pp. 759- 772 ,(1968) , 10.1139/P68-094
Mark T. Robinson, Computer simulation of the self‐sputtering of uranium Journal of Applied Physics. ,vol. 54, pp. 2650- 2659 ,(1983) , 10.1063/1.332267
M. Vicanek, J.J.Jimenez Rodriguez, P. Sigmund, Depth of origin and angular spectrum of sputtered atoms Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 36, pp. 124- 136 ,(1989) , 10.1016/0168-583X(89)90574-0
Heinrich Gades, Herbert M. Urbassek, Preferential sputtering of alloys: a molecular-dynamics study Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 102, pp. 261- 271 ,(1995) , 10.1016/0168-583X(95)80152-C
Peter Sigmund, Mechanisms and theory of physical sputtering by particle impact Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms. ,vol. 27, pp. 1- 20 ,(1987) , 10.1016/0168-583X(87)90004-8
W. D. Wilson, L. G. Haggmark, J. P. Biersack, Calculations of nuclear stopping, ranges, and straggling in the low-energy region Physical Review B. ,vol. 15, pp. 2458- 2468 ,(1977) , 10.1103/PHYSREVB.15.2458
Klaus Wittmaack, Energy- and angle-resolved depth of origin of isotopes sputtered from an elemental target Physical Review B. ,vol. 56, ,(1997) , 10.1103/PHYSREVB.56.R5701