Depth of Origin of Atoms Sputtered from WyC1-y Compounds and the Pure Elements. A TRIM.SP and TRIDYN Simulation Study
作者： W. Eckstein , V.I. Shulga
DOI: 10.1016/S0168-583X(99)01033-2
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摘要: Abstract The depth of origin sputtered atoms is investigated for tungsten carbide as an example a compound with two species large difference in mass. results are compared those the elemental C and W. This work extension our previous on targets. Monte Carlo program TRIM.SP applied to calculate distribution dependencies mean projectile energy, E , angle incidence, α target atomic species, bombardment Ar energy range 0.1–100 keV. In addition, change distributions bombarding fluence studied dynamic TRIDYN.
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