Kinetic study of copper chemistry in chemical mechanical polishing (CMP) by an in-situ real time measurement technique

Heinz Raether, Excitation of Plasmons and Interband Transitions by Electrons ,(1980)

Marcel Pourbaix, Atlas of Electrochemical Equilibria in Aqueous Solutions ,(1974)

Heinz Raether, Surface Plasmons on Smooth and Rough Surfaces and on Gratings ,(1988)

T Du, D Tamboli, V Desai, S Seal, None, Mechanism of Copper Removal during CMP in Acidic H 2 O 2 Slurry Journal of The Electrochemical Society. ,vol. 151, ,(2004) , 10.1149/1.1648029

Sabine Szunerits, Yannick Coffinier, Sébastien Janel, Rabah Boukherroub, Stability of the gold/silica thin film interface : Electrochemical and surface plasmon resonance studies Langmuir. ,vol. 22, pp. 10716- 10722 ,(2006) , 10.1021/LA060793O

Kazuki Inamori, Motoki Kyo, Yoshiaki Nishiya, Yusuke Inoue, Tatsuhiko Sonoda, Eiji Kinoshita, Tohru Koike, Yoshiki Katayama, Detection and quantification of on-chip phosphorylated peptides by surface plasmon resonance imaging techniques using a phosphate capture molecule Analytical Chemistry. ,vol. 77, pp. 3979- 3985 ,(2005) , 10.1021/AC050135T

Rebecca J Green, Richard A Frazier, Kevin M Shakesheff, Martyn C Davies, Clive J Roberts, Saul J.B Tendler, Surface plasmon resonance analysis of dynamic biological interactions with biomaterials Biomaterials. ,vol. 21, pp. 1823- 1835 ,(2000) , 10.1016/S0142-9612(00)00077-6

Marek Piliarik, Hana Vaisocherová, Jiří Homola, Towards parallelized surface plasmon resonance sensor platform for sensitive detection of oligonucleotides Sensors and Actuators B-chemical. ,vol. 121, pp. 187- 193 ,(2007) , 10.1016/J.SNB.2006.09.009

Samuel Terrettaz, Thierry Stora, Claus Duschl, Horst Vogel, Protein binding to supported lipid membranes: investigation of the cholera toxin-ganglioside interaction by simultaneous impedance spectroscopy and surface plasmon resonance Langmuir. ,vol. 9, pp. 1361- 1369 ,(1993) , 10.1021/LA00029A033

Serdar Aksu, Fiona M. Doyle, The Role of Glycine in the Chemical Mechanical Planarization of Copper Journal of The Electrochemical Society. ,vol. 149, ,(2002) , 10.1149/1.1474436