Jet Mill Producing Fine Silicon Powder
作者： Ranaan Zehavi , James E. Boyle
DOI:
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摘要: A method of jet milling silicon powder in which pellets are fed into a mill producing gas vortex the entrained and pulverized by collisions with each other or walls chamber. The chamber advantageously formed high-purity as parts contacting unground ground powder. may be electronic grade but polycrystalline used for parts. Additionally, particle feed tube particles flow finder operating outlet at center silicon. nitrogen supplied from liquid-nitrogen tank lined stainless steel. chemical vapor deposition.
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