Modification of mechanical properties of Si crystal irradiated by Kr-beam
作者： Xiaowei Guo , Sadao Momota , Noriko Nitta , Takaharu Yamaguchi , Noriyuki Sato
DOI: 10.1016/J.APSUSC.2015.04.193
关键词:
摘要: Abstract The application of ion-beam irradiation in fabrication structures with micro-/nanometer scale has achieved striking improvement. However, an inevitable damage results the change mechanical properties irradiated materials. To investigate relation between and ion-irradiation damages, nanoindentation was performed on crystalline silicon by Kr-beam energy 240 keV. Modified Young's modulus nanohardness, provided from indentation, indicated fluence dependence. Stopping range ions matter (SRIM) calculation, transmission electron microscopy (TEM) observation, Rutherford backscattering-channeling (RBS-C) measurement were utilized to understand effect properties. In addition, longitudinal size phase transition region induced indentation firstly evaluated based depth profile modified nanohardness.
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