Direct-write inkjet printing for fabrication of barium strontium titanate-based tunable circuits
作者： T. Kaydanova , A. Miedaner , J.D. Perkins , C. Curtis , J.L. Alleman
DOI: 10.1016/J.TSF.2006.10.009
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摘要: Abstract Tunable capacitors with up to 30% tuning and a loss tangent (tanδ) less than 0.002 at 1 MHz were fabricated from Ba 0.6 Sr 0.4 TiO 3 (BST) films using inkjet-printed liquid metalorganic precursors. BST of various thicknesses produced by printing multiple stacks the individual layers. The dielectric constant printed increased as function thickness. largest constant, 1000, highest tunability, 30%, measured on 420 nm thick film, thickest film studied in this work. Spray-printed silver contacts employed demonstrated good adhesion electrical contact films. This also proof principle for direct-write metal onto sources.
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