Directed growth of horizontally aligned gallium nitride nanowires for nanoelectromechanical resonator arrays.
作者： Tania Henry , Kyungkon Kim , Zaiyuan Ren , Christopher Yerino , Jung Han
DOI: 10.1021/NL071530X
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摘要: We report the growth of horizontally aligned arrays and networks GaN nanowires (NWs) as resonant components in nanoelectromechanical systems (NEMS). A combination top-down selective area (SAG) bottom-up vapor−liquid−solid (VLS) synthesis enables flexible fabrication highly ordered nanowire situ with no postgrowth dispersion. Mechanical resonance free-standing are measured, quality factors (Q) ranging from 400 to 1000. obtained a Young's modulus (E) ∼338 GPa an array NWs varying diameters lengths. The measurement allows detection motion rotating frame reveals dual fundamental modes two orthogonal planes. universal ratio between frequencies these modes, irrespective their dimensions, is observed attributed isosceles cross section NWs.
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Silvija Gradečak, Fang Qian, Yat Li, Hong-Gyu Park, Charles M. Lieber, GaN nanowire lasers with low lasing thresholds Applied Physics Letters. ,vol. 87, pp. 173111- ,(2005) , 10.1063/1.2115087
H. Marchand, J.P. Ibbetson, P.T. Fini, S. Keller, S.P. DenBaars, J.S. Speck, U.K. Mishra, Mechanisms of lateral epitaxial overgrowth of gallium nitride by metalorganic chemical vapor deposition Journal of Crystal Growth. ,vol. 195, pp. 328- 332 ,(1998) , 10.1016/S0022-0248(98)00591-0
Dustin W. Carr, S. Evoy, L. Sekaric, H. G. Craighead, J. M. Parpia, Measurement of mechanical resonance and losses in nanometer scale silicon wires Applied Physics Letters. ,vol. 75, pp. 920- 922 ,(1999) , 10.1063/1.124554
Yi Cui, Qingqiao Wei, Hongkun Park, Charles M Lieber, Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species Science. ,vol. 293, pp. 1289- 1292 ,(2001) , 10.1126/SCIENCE.1062711
E.I. Givargizov, Fundamental aspects of VLS growth Journal of Crystal Growth. ,vol. 31, pp. 20- 30 ,(1975) , 10.1016/0022-0248(75)90105-0
C. Q. Chen, Y. Shi, Y. S. Zhang, J. Zhu, Y. J. Yan, Size dependence of Young's modulus in ZnO nanowires. Physical Review Letters. ,vol. 96, pp. 075505- ,(2006) , 10.1103/PHYSREVLETT.96.075505
Xue Ming Henry Huang, Christian A. Zorman, Mehran Mehregany, Michael L. Roukes, Nanodevice motion at microwave frequencies Nature. ,vol. 421, pp. 496- 496 ,(2003) , 10.1038/421496A
R. Nowak, M. Pessa, M. Suganuma, M. Leszczynski, I. Grzegory, S. Porowski, F. Yoshida, Elastic and plastic properties of GaN determined by nano-indentation of bulk crystal Applied Physics Letters. ,vol. 75, pp. 2070- 2072 ,(1999) , 10.1063/1.124919
X. D. Bai, P. X. Gao, Z. L. Wang, E. G. Wang, Dual-mode mechanical resonance of individual ZnO nanobelts Applied Physics Letters. ,vol. 82, pp. 4806- 4808 ,(2003) , 10.1063/1.1587878
Christine C Mitchell, Michael E Coltrin, Jung Han, Mass transport in the epitaxial lateral overgrowth of gallium nitride Journal of Crystal Growth. ,vol. 222, pp. 144- 153 ,(2001) , 10.1016/S0022-0248(00)00874-5