Wafer scale bonded active photonics interposer

作者: Gerald Leake , Douglas Coolbaugh , Douglas La Tulipe

DOI:

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摘要: There is set forth herein a method including building an interposer base structure on first wafer having substrate, wherein the includes fabricating plurality of through vias that extend substrate and within dielectric stack formed one or more metallization layer; photonics second device device; bonding to define fabricated stack. optoelectrical system substrate; stack, bond layer integrally bonds

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