Decomposition of Dichlorodifluoromethane by Adding Hydrogen in a Cold Plasma System

摘要: The destruction of chlorofluorocarbons (CFCs) has drawn great attention because its well-known depletion the ozone layer at stratosphere. Application RF plasma for decomposition and conversion dichlorodifluoromethane (CFC-12 or CCl{sub 2}F{sub 2}) is demonstrated. efficiency ({eta}{sub CFC-12}) fraction total carbon input converted into CH{sub 4} C{sub 2}H{sub 2} (F{sub 4}+C{sub 2}}) in H{sub Ar mixtures have been investigated as a function power wattage, 2}/CFC-12 ratio, operational pressure, CFC-12 feeding concentration by using response surface methodology model sensitivity analysis. results showed that {eta}{sub CFC-12} over 94% F{sub 2}} 80% under condition 100 W 7.0 15 Torr 7.6% concentration. In addition, result analysis indicated both are more sensitive to wattage. Experimental could be up hydrogen-based plasmamore » system.« less