Novel method for melt flow control in unidirectional solidification of multi-crystalline silicon

作者: D. Vizman , C. Tanasie

DOI: 10.1016/J.JCRYSGRO.2013.02.014

关键词:

摘要: Abstract Based on numerical modeling, a novel method for melt stirring in the directional solidification of multicrystalline silicon is proposed. It consists two electrodes contact with free surface. The whole placed low intensity vertical magnetic field and an electrical DC current passes through electrodes. was found that even small (10 mT) max 10 A can produce significant effect. expected to influence dopant impurities distribution beneficial way. interface shape also studied it large currents (5–10 A) make impact shape, but values (2 A) be deflection.

参考文章(21)
Wei Wang, Masahito Watanabe, Taketoshi Hibiya, Takahiko Tanahashi, Three-Dimensional Simulation of Silicon Melt Flow in Electromagnetic Czochralski Crystal Growth Japanese Journal of Applied Physics. ,vol. 39, pp. 372- 377 ,(2000) , 10.1143/JJAP.39.372
B. Willers, S. Eckert, U. Michel, I. Haase, G. Zouhar, The columnar-to-equiaxed transition in Pb–Sn alloys affected by electromagnetically driven convection Materials Science and Engineering A-structural Materials Properties Microstructure and Processing. ,vol. 402, pp. 55- 65 ,(2005) , 10.1016/J.MSEA.2005.03.108
D. Vizman, M. Watanabe, J. Friedrich, G. Müller, Influence of different types of magnetic fields on the interface shape in a 200mm Si-EMCZ configuration Journal of Crystal Growth. ,vol. 303, pp. 221- 225 ,(2007) , 10.1016/J.JCRYSGRO.2006.11.347
K. Dadzis, J. Ehrig, K. Niemietz, O. Pätzold, U. Wunderwald, J. Friedrich, Model experiments and numerical simulations for directional solidification of multicrystalline silicon in a traveling magnetic field Journal of Crystal Growth. ,vol. 333, pp. 7- 15 ,(2011) , 10.1016/J.JCRYSGRO.2011.08.009
A. Muiznieks, A. Krauze, B. Nacke, Convective phenomena in large melts including magnetic fields Journal of Crystal Growth. ,vol. 303, pp. 211- 220 ,(2007) , 10.1016/J.JCRYSGRO.2006.12.051