Methods for preventing corrosion of plasma-exposed yttria coated constituents
作者： Peter Loewenhardt , Yunsang Kim , Ganapathy Swami
DOI:
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摘要: In accordance with one embodiment of the present disclosure, a method for preventing corrosion plasma-exposed yttria-coated constituent from ambient acidic hydrolysis wherein includes hydrolysable acid precursor is disclosed. The may include: removing semiconductor processing assembly; binding flexible moisture wicking material; hydrolyzing an overwhelming aqueous admixture to form vitiated compound, material pulls compound away capillary action; dehydrating additional pull latent amount constituent; and isolating in obstructing enclosure.
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