CVD SiC deformable mirror with monolithic cooling channels.

摘要: We propose a novel deformable mirror (DM) for adaptive optics in high power laser applications. The is made of Silicon carbide (SiC) faceplate, and cooling channels are embedded monolithically inside the faceplate with chemical vapor desposition (CVD) method. 200 mm diameter 3 thickness, actuated by 137 stack-type piezoelectric transducers arranged square grid. also new actuator influence function optimized modelling our DM, which has relatively stiffer higher coupling ratio compared other DMs having thin faceplates. capability optical performance DM verified simulations actual experiments heat source. proved to operate at 1 kHz without coolant flow 100 Hz flow, residual errors after compensation less than 30 nm rms (root-mean-square). This paper presents design, fabrication, CVD SiC DM.