Design and characterization of collimated effusive gas beam sources: Effect of source dimensions and backing pressure on total flow and beam profile
作者： Jeffrey M. Guevremont , Stanley Sheldon , Francisco Zaera
DOI: 10.1063/1.1311939
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摘要: The total flux and the flow profile of gas-phase molecular beams generated by a number assemblies involving different combinations apertures capillary arrays were measured for wide range backing pressures covering viscous regimes. Specifically, δ=10 50 μm diameter, L=2 mm thick glass combined with single φ=0.17, 1.0, 11.4 mm diameters L=0.1, 0.5, 2 thickness in order to design high-flux beam dosers high degree collimation. variations spatial tested as function pressure, which was varied between 10−4 102 Torr, sampling movable skimmer. data obtained under (low pressure) regime corroborate some conclusions from previous reports. In particular, it is shown here that conductance (the ratio depends only on their geometry tha...
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sci-hub.se 参考文章(42)
H.P. Steinrück, K.D. Rendulic, A test of capillary array beam sources for very large Knudsen numbers Vacuum. ,vol. 36, pp. 213- 215 ,(1986) , 10.1016/0042-207X(86)90002-3
Daniel M. Murphy, Wall collisions, angular flux, and pumping requirements in molecular flow through tubes and microchannel arrays Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. ,vol. 7, pp. 3075- 3091 ,(1989) , 10.1116/1.576317
T. Engel, G. Ertl, A molecular beam investigation of the catalytic oxidation of CO on Pd (111) Journal of Chemical Physics. ,vol. 69, pp. 1267- 1281 ,(1978) , 10.1063/1.436666
Chinnakonda S Gopinath, Francisco Zaera, None, A molecular beam study of the kinetics of the catalytic reduction of NO by CO on Rh(111) single-crystal surfaces Journal of Catalysis. ,vol. 186, pp. 387- 404 ,(1999) , 10.1006/JCAT.1999.2561
Edmond S. Perry, John H. Durant, Sanborn C. Brown, 1956 National Symposium on Vacuum Technology Transactions Physics Today. ,vol. 11, pp. 38- 39 ,(1958) , 10.1063/1.3062567
Andrew M. Glines, Robert N. Carter, A. Brad Anton, An alternative for gas dosing in ultrahigh vacuum adsorption studies Review of Scientific Instruments. ,vol. 63, pp. 1826- 1833 ,(1992) , 10.1063/1.1143344
P. Clausing, The Flow of Highly Rarefied Gases through Tubes of Arbitrary Length Journal of Vacuum Science and Technology. ,vol. 8, pp. 636- 646 ,(1971) , 10.1116/1.1316379
Theodore E. Madey, Adsorption of oxygen on W(100): Adsorption kinetics and electron stimulated desorption Surface Science. ,vol. 33, pp. 355- 376 ,(1972) , 10.1016/0039-6028(72)90214-2
H. C. W. Beijerinck, N. F. Verster, Velocity distribution and angular distribution of molecular beams from multichannel arrays Journal of Applied Physics. ,vol. 46, pp. 2083- 2091 ,(1975) , 10.1063/1.321845
M. V. Kurepa, C. B. Lucas, The density gradient of molecules flowing along a tube Journal of Applied Physics. ,vol. 52, pp. 664- 669 ,(1981) , 10.1063/1.328844