Optical properties of sputter-deposited aluminium nitride films on silicon
作者： P.B. Legrand , M. Wautelet , B. Dugnoille , J.P. Dauchot , M. Hecq
DOI: 10.1016/0040-6090(94)90014-0
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摘要: Abstract The optical properties of thin sputter-deposited A1N films on Si were measured. It is shown that they depend the exact preparation conditions. In visible range, refractive index n fitted by = c1 exp(-λ/c2) + c3, where 2.09 and c2 131.9 nm are constant c3 ≈ 1.8 –2.5 depending also chromaticity coordinates vary quasi-periodically with product its thickness.
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