Optical and thermal characterization of AlN thin films deposited by pulsed laser deposition
作者： A. Jacquot , B. Lenoir , A. Dauscher , P. Verardi , F. Craciun
DOI: 10.1016/S0169-4332(01)00767-X
关键词: Pulsed laser deposition 、 Laser 、 Refractive index 、 Thermal conductivity 、 Materials science 、 Atmospheric temperature range 、 Analytical chemistry 、 Thin film 、 Infrared spectroscopy 、 Laser ablation
摘要: … We also present measurements of the cross-plane thermal conductivity that have been … simple experimental set-up, based on a Nd–YAG laser, we succeeded in the deposition of highly …
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