Nano beam diffraction and precession in an energy filtered CS corrected transmission electron microscope

作者: G. Benner , H. Niebel , G. Pavia

DOI: 10.1002/CRAT.201000582

关键词:

摘要: Nano beam diffraction is a prerequisite to collecting structural information from particles as small 1 nm in diameter. We describe here novel ray path, where the limiting illumination aperture arranged higher up system of transmission electron microscope (TEM) so that it can be demagnified further. This results high flexibility concerning illuminating field and convergence angle without any need for readjustments pivot points refocusing lens. show artifact-free patterns obtained with fields down 20 diameter under genuine parallel conditions. The limitations nano mode by physical effects are discussed. Either or spots both may fringes result these effects. Zero energy loss filtering (precession) spot increases their contrast makes weak visible. A method acquire (energy filtered precession) pattern spherical aberration (CS) corrected TEM has been developed first presented. (© 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)

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