The Stress and Morphology Evolution of CZO Films Under Different Growth Temperature
作者： Dong Zhao , Yunyan Liu , Shutao Li , Rendong Wang , Junshan Xiu
DOI: 10.1007/978-981-13-0110-0_1
关键词:
摘要: Zn 1− x Co x O (x= 0.05, CZO) thin films are deposited on Si (111) and glass substrates at different substrate temperatures from 350 to 500° C. All the CZO films on glass substrates …
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