Self-consistent particle modeling of radio frequency discharge in Ar/O2 mixtures: Effects of crossed electric and magnetic fields and partial pressure
作者： Djilali Benyoucef , Mohammed Yousfi , Bachir Belmadani
DOI: 10.1063/1.3569708
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摘要: A particle-in-cell/Monte Carlo model is developed to study and analyze the electrical characteristics of nonequilibrium plasma created by radio frequency (RF) discharge in Ar/O2 mixtures presence crossed electric magnetic fields. The method collision treatment based on an optimized estimation free time flight. needed basic data—more specifically, ion–neutral cross sections—are determined first. simulation conditions are 50 mTorr for total gas pressure 200 V peak RF voltage at a 13.56 MHz. field varied from 0 G. effect partial ratio O2 mixture magnitude discussed. In particular, results show increase density that ten times higher field.
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