Particle-in-cell Monte Carlo and fluid simulations of argon-oxygen plasma: Comparisons with experiments and validations

摘要: Particle-in-cell Monte Carlo collision (PIC-MCC) and fluid simulations of argon-oxygen plasmas in capacitively inductively coupled plasma reactors are presented. Potential profiles electron/ion kinetic information such as energy distributions temperatures compared with experimental data well other analytical numerical results. One-dimensional PIC-MCC compare favorably obtained over a wide range pressure power. Two-dimensional capacitive discharges differs from the results nonlocal effects play an important role these discharges. Fluid plasmas, however, agree observations.