Micromachined Silicon Tools for Nanometer-Scale Science

摘要: Silicon microfabrication techniques are well suited for the fabrication of complex integrated microsystems including sensors, actuators and signal processing units. In particular, a high resolution surface scanning microscope such as atomic force (AFM) is less sensitive to vibrations thermal drift if it miniaturized; therefore, these special interest an AFM sensor unit. We present different types silicon based microstructures use in science instruments, where tip manipulation required with accuracy. Micromachined cantilevers tips various shapes microscopes were reproducibly fabricated our laboratories by means steps dry wet etching silicon. They successfully utilized commercial AFM’s. Furthermore, we sensor-head capacitive read-out consisting two adjacent forming capacitance about 0.2 pF. Typical forces order nN induce bending sensing cantilever change tens fF which requires electronics detection. addition, developed polysilicon xy-microstage submicrometer wide suspension beams driven electrostatic comb actuators. This device allows relatively low driving voltage (around 40 V) positioning center stage range 10 gm better than 80 nm. Its main features quick response time, no hysteresis feasibility position monitoring.