High current Ni- and Fe-ion implantation into an Al surface to modify the mechanical properties

摘要: Abstract The surface modification of Al was studied by high current Ni- and Fe-ion implantation using a metal vapor vacuum arc ion source. strengthening intermetallic aluminides were formed after to doses in the order 1017–1018 ions cm−2. depth profiles hardening phases found depend on density as well dose. In case Ni-implantation, when implanting with 89 μA cm−2 dose 6 ×1017 cm−2, Al3Ni phase near enriched up 85 vol.% extended into about 4000 A. implantation, dual resulted an almost unique Al13Fe4 compound standing layer 1000 A thickness spreading 4500 depth. Accordingly, microhardness implanted films measured be considerably increased. mechanisms responsible for formation are also discussed.