Energy control for an excimer or molecular fluorine laser

摘要: A method and gas replenishment algorithm for excimer molecular fluorine lasers is based on parameters upon which aging more closely depends than pulse count, such as input energy to the electrical discharge, also preferably time. burst control includes measuring energies of initial pulses a first occurring after long break, calculating values voltages that would bring output individual laser or groups substantially same values, applying calculated in subsequent break achieve predetermined pulses. Similar operations may be performed one bursts following burst. The maintained table voltage read by processor signals power supply circuit apply according table. second table, third etc. final used all until another again occurs, break.