Fabrication of Highly Crystalline Corundum-Structured α-(Ga1-xFex)2O3 Alloy Thin Films on Sapphire Substrates
作者： Kentaro Kaneko , Taichi Nomura , Itsuhiro Kakeya , Shizuo Fujita
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摘要: Highly crystalline corundum-structured α-(Ga1-xFex)2O3 alloy thin films were fabricated on c-plane sapphire substrates by using a mist chemical vapor deposition method. The full-widths at half maximum of X-ray diffraction rocking curves smaller than 100 arcsec for the entire range x from 0 to 1. Optical band gaps artificially tuned value between those α-Ga2O3 and α-Fe2O3, that is, 2.2 5.3 eV with changing Fe content in films. Magnetic measurements revealed ferromagnetic properties (x = 0.24) film 110 K.
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