Fabrication of cerium-doped yttrium aluminum garnet thin films by a mist CVD method
作者： Shunsuke Murai , Takafumi Sato , Situ Yao , Ryosuke Kamakura , Koji Fujita
DOI: 10.1016/J.JLUMIN.2015.10.048
关键词:
摘要: Abstract We synthesized thin films, consisting of yttrium aluminum garnet doped with Ce3+ (YAG:Ce), using the mist chemical vapor deposition (CVD) method, which allows fabrication high-quality films under atmospheric conditions without use vacuum equipment. Under a rate approximately 1 μm/h, obtained had typical thickness 2 μm. The XRD analysis indicated that consisted single-phase YAG:Ce. Rutherford backscattering confirmed stoichiometry; composition film was determined to be (Y, Ce)3Al5O12, Ce content Ce/(Y+Ce)=2.5%. YAG:Ce exhibited fluorescence due 5d–4f electronic transitions characteristic ions occupying eight-coordinated dodecahedral sites in YAG lattice.
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