Apparatus and methods for semiconductor wafer testing

摘要: An automatic system for performing sheet resistivity testing on surface layers of semiconductor wafers, including a wafer handling stage having platform carrying wafer, and an arrangement mounting the rotation about central axis translation orthogonal to major thereof. A drive translates between test position load position, rotates accurately located angular positions. probe includes carriage parallel parked in which prove thereon is positioned adjacent clear positions along radius platform. The carries element contacting wafer. light tight housing surrounds access door therein facing intermediate under controlled motor closed open permits translate Sensor arrangements cooperate with safety inhibit circuit preclude destructive movement components when conflict sensed. All movements measurements are microcomputer control.