Method of measuring resistivity, and apparatus therefor
作者： Masato Yamashita , Yasusuke C , O Shinsozai Kenkyu Sho Yamaguchi , Hideto C , O Nihon Sumsonics Co. Ltd. Hashizume
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摘要: A method and apparatus for measuring resistivity employing the four-point probe to measure surface or volume of a sample. The includes inputting sample shape information calculating resistance correction coefficient (F;FP) is calculated by multiplying value coefficient. an input unit (51) information, designating measurement position on sample, (50) coefficient, probe. (56) including four colinear electrodes (11,12,13,14), detecting (55) passing predetermined current through two outer (11,14) potential difference across inner (12,13), resistivity:
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