Room temperature replication in spin on glass by nanoimprint technology
作者： S. Matsui , Y. Igaku , H. Ishigaki , J. Fujita , M. Ishida
DOI: 10.1116/1.1417547
关键词:
摘要: A compact nanoimprint lithography (NIL) system using the driving power of a stepping motor has been developed. Compared to conventional NIL with hydraulic press, there are some additional features such as compactness and low cost. We propose use spin on glass (SOG) instead PMMA avoid thermal expansion demonstrate SOG patterns 200 nm linewidths at room temperature replications system. The were transferred gold metal liftoff silicon substrate by reactive ion etching.
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