Rutherford backscattering analysis of compositionally graded BaxSr1-xTiO3 thin films

摘要: Abstract Rutherford backscattering spectrometry (RBS) has been successfully applied to characterize compositionally graded BaxSr1-xTiO3 thin films fabricated by the sol-gel method. from × = 0.7 1 (upgraded) and (downgraded) were on silicon substrates as well Pt/Ti/SiO2/Si substrates. For both upgraded downgraded films, measured Ba Sr compositional gradients along depth are consistent with nominal values tailored during fabrication. XRD patterns demonstrate existence of a perovskite structure. Thicknesses determined cross-sectional SEM micrographs RBS results.