Electroless Silver and Silver with Tungsten Thin Films for Microelectronics and Microelectromechanical System Applications
作者： Yosi Shacham-Diamand , Alexandra Inberg , Yelena Sverdlov , Nathan Croitoru
DOI: 10.1149/1.1393904
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摘要: … We used Na2WO4 that was added into silver electroless plating bath for preparing Ag(W) … The silicon surface was activated by either wet or dry methods prior to the electroless plating. …
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