作者: Hervè Pelletier , Adele Carradò , Jacques Faerber , Ion N. Mihailescu
DOI: 10.1007/S00339-010-6144-8
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摘要: We synthesized by pulsed laser deposition a bilayer of Ti/TiN on Si(100) wafers which was coated in next step with hydroxyapatite (samples labelled HA-1). Some the structures were further thermally treated water vapour jet HA-2). In SEM, HA surface looked rough, micronic droplets. TEM and SAED investigations revealed compact organization crystals case HA-1 sample, while two regions (one one porous) identified for HA-2 triclinic within 500 nm range. XTEM, at Si/TiN border, 2–3 SiO2 layer visible, whereas TiN/Ti border there smooth transition from fcc (111) TiN to hcp (100) Ti. The elongated normal surface. According Berkovich indentation qualitative analyses, sample more homogeneous harder but brittle. Scratch tests confirmed quantitatively that resistant adherent than films. first case, big droplets only removed indenter, films delaminated large areas as result wedge spallation failure.