Glass cutting by femtosecond pulsed irradiation

摘要: We report on quartz and glass cutting by a lateral scanning of femtosecond pulses (150 fs at 1 kHz repetition rate) 800 nm wavelength room low pressure (5 Torr) air ambience. Pulses were focused numerical aperture (NA0.1) objective lens. Optimization fabrication conditions: pulse energy speed carried out to achieve large-scale (millimeter-to-centimeter) free microcracks submicron dimensions along the edges walls cut. Cutting through samples 0.1-0.5 mm thickness was successfully achieved without apparent heat affected zone. At ambience, redeposition ablated material considerably reduced. It is demonstrated that damage rear surface induced stress waves, which originated from plasma ablation pulse. The mechanism femtosecond-laser transparent materials high irradiance influence waves generated plume are discussed.