X-Y Work table

作者: Nicholas Guarino

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摘要: Apparatus comprising a work table movable along orthogonal axes, and optical means, including mirrors with the table, for sensing positions of featuring an improvement wherein comprises solid block metal, means are provided to secure workpiece move block, two external surfaces polished provide mirrors.

参考文章(4)
J. Pasiecznik, J. W. Reeds, Digitally positioned mechanical stage Journal of Vacuum Science and Technology. ,vol. 15, pp. 909- 912 ,(1978) , 10.1116/1.569626
Masahiko Sumi, Electron beam exposure apparatus ,(1977)